Master Tool Fabrication for the Replication of Micro and Nano Features

Hirshy H.; Lalev G.; Velkova V. L.; Scholz S.; Dimov S. S.; Krastimir Popov

doi:10.3850/978-981-07-0319-6_215

Master Tool Fabrication for the Replication of Micro and Nano Features

Hirshy H., Lalev G., Velkova V. L., Scholz S., Dimov S. S., Krastimir Popov

Research output: Contribution to conference › Other › peer-review

Abstract

A novel process chain for master tool fabrication for the replication of micro and nano features is presented in this paper. The proposed process flow relies on using complementary direct write and replication technologies for micro- and nano-structuring over relatively large areas. Results are presented when the process chain is implemented for the production of 5”x5” Ni shims of 2.5D topography of different test structures incorporating different feature sizes.

Original language	English
Pages	317-320
DOIs	https://doi.org/10.3850/978-981-07-0319-6_215
Publication status	Published - 2011
Event	8th International Conference on Multi-Material Micro Manufacture - Duration: 8 Nov 2011 → 10 Nov 2011

Conference

Conference	8th International Conference on Multi-Material Micro Manufacture
Period	8/11/11 → 10/11/11

Keywords

Process chain
FIB
Tool manufacture
UV-NIL
Electroforming
Ni-shim

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10.3850/978-981-07-0319-6_215Licence: CC BY-NC-ND

Cite this

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title = "Master Tool Fabrication for the Replication of Micro and Nano Features",

abstract = "A novel process chain for master tool fabrication for the replication of micro and nano features is presented in this paper. The proposed process flow relies on using complementary direct write and replication technologies for micro- and nano-structuring over relatively large areas. Results are presented when the process chain is implemented for the production of 5”x5” Ni shims of 2.5D topography of different test structures incorporating different feature sizes.",

keywords = "Process chain, FIB, Tool manufacture, UV-NIL, Electroforming, Ni-shim",

author = "Hirshy H. and Lalev G. and {V. L.}, Velkova and Scholz S. and {S. S.}, Dimov and Krastimir Popov",

year = "2011",

doi = "10.3850/978-981-07-0319-6_215",

language = "English",

pages = "317--320",

note = "8th International Conference on Multi-Material Micro Manufacture ; Conference date: 08-11-2011 Through 10-11-2011",

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TY - CONF

T1 - Master Tool Fabrication for the Replication of Micro and Nano Features

AU - H., Hirshy

AU - G., Lalev

AU - V. L., Velkova

AU - S., Scholz

AU - S. S., Dimov

AU - Popov, Krastimir

PY - 2011

Y1 - 2011

N2 - A novel process chain for master tool fabrication for the replication of micro and nano features is presented in this paper. The proposed process flow relies on using complementary direct write and replication technologies for micro- and nano-structuring over relatively large areas. Results are presented when the process chain is implemented for the production of 5”x5” Ni shims of 2.5D topography of different test structures incorporating different feature sizes.

AB - A novel process chain for master tool fabrication for the replication of micro and nano features is presented in this paper. The proposed process flow relies on using complementary direct write and replication technologies for micro- and nano-structuring over relatively large areas. Results are presented when the process chain is implemented for the production of 5”x5” Ni shims of 2.5D topography of different test structures incorporating different feature sizes.

KW - Process chain

KW - FIB

KW - Tool manufacture

KW - UV-NIL

KW - Electroforming

KW - Ni-shim

U2 - 10.3850/978-981-07-0319-6_215

DO - 10.3850/978-981-07-0319-6_215

M3 - Other

SP - 317

EP - 320

T2 - 8th International Conference on Multi-Material Micro Manufacture

Y2 - 8 November 2011 through 10 November 2011

ER -

Master Tool Fabrication for the Replication of Micro and Nano Features

Abstract

Conference

Keywords

Access to Document

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Cite this