A novel process chain for master tool fabrication for the replication of micro and nano features is presented in this paper. The proposed process flow relies on using complementary direct write and replication technologies for micro- and nano-structuring over relatively large areas. Results are presented when the process chain is implemented for the production of 5”x5” Ni shims of 2.5D topography of different test structures incorporating different feature sizes.
|Publication status||Published - 2011|
|Event||8th International Conference on Multi-Material Micro Manufacture - |
Duration: 8 Nov 2011 → 10 Nov 2011
|Conference||8th International Conference on Multi-Material Micro Manufacture|
|Period||8/11/11 → 10/11/11|
- Process chain
- Tool manufacture