Data Modelling & Acquisition in Compound Semiconductor Manufacturing

C. Richards; H. Williams; C. Meadows; Hefin Rowlands; M. Stanton

Data Modelling & Acquisition in Compound Semiconductor Manufacturing

C. Richards, H. Williams, C. Meadows, Hefin Rowlands, M. Stanton

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	WESIC 2001, Proceedings of the 3rd Workshop on European Scientific and Industrial Collaboration
Editors	J. van Amerongen, Jan B, Jonker, Paulus P.L. Retigen
Place of Publication	Enschede, The Netherlands
Publisher	Universiteit Twente
Pages	227-235
ISBN (Print)	90-365-1664-1
Publication status	Published - 2001
Event	3nd Workshop on European Scientific and Industrial Collaboration - University of Twente, Twente, Netherlands Duration: 27 Jun 2001 → 29 Jun 2001

Conference

Conference	3nd Workshop on European Scientific and Industrial Collaboration
Abbreviated title	WESIC 2001
Country/Territory	Netherlands
City	Twente
Period	27/06/01 → 29/06/01

Cite this

@inproceedings{5f403782a5794b8ba6c32968318f8296,

title = "Data Modelling & Acquisition in Compound Semiconductor Manufacturing",

author = "C. Richards and H. Williams and C. Meadows and Hefin Rowlands and M. Stanton",

year = "2001",

language = "English",

isbn = "90-365-1664-1",

pages = "227--235",

editor = "{van Amerongen}, {J. } and Jonker, {Jan B,} and Retigen, {Paulus P.L.}",

booktitle = "WESIC 2001, Proceedings of the 3rd Workshop on European Scientific and Industrial Collaboration",

publisher = "Universiteit Twente",

note = "3nd Workshop on European Scientific and Industrial Collaboration, WESIC 2001 ; Conference date: 27-06-2001 Through 29-06-2001",

}

Richards, C, Williams, H, Meadows, C, Rowlands, H & Stanton, M 2001, Data Modelling & Acquisition in Compound Semiconductor Manufacturing. in J van Amerongen, JB Jonker & PPL Retigen (eds), WESIC 2001, Proceedings of the 3rd Workshop on European Scientific and Industrial Collaboration. Universiteit Twente, Enschede, The Netherlands, pp. 227-235, 3nd Workshop on European Scientific and Industrial Collaboration, Twente, Netherlands, 27/06/01.

Data Modelling & Acquisition in Compound Semiconductor Manufacturing. / Richards, C.; Williams, H.; Meadows, C. et al.
WESIC 2001, Proceedings of the 3rd Workshop on European Scientific and Industrial Collaboration. ed. / J. van Amerongen; Jan B, Jonker; Paulus P.L. Retigen. Enschede, The Netherlands: Universiteit Twente, 2001. p. 227-235.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Data Modelling & Acquisition in Compound Semiconductor Manufacturing

AU - Richards, C.

AU - Williams, H.

AU - Meadows, C.

AU - Rowlands, Hefin

AU - Stanton, M.

PY - 2001

Y1 - 2001

M3 - Conference contribution

SN - 90-365-1664-1

SP - 227

EP - 235

BT - WESIC 2001, Proceedings of the 3rd Workshop on European Scientific and Industrial Collaboration

A2 - van Amerongen, J.

A2 - Jonker, Jan B,

A2 - Retigen, Paulus P.L.

PB - Universiteit Twente

CY - Enschede, The Netherlands

T2 - 3nd Workshop on European Scientific and Industrial Collaboration

Y2 - 27 June 2001 through 29 June 2001

ER -