A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation

Steffan James, Hefin Rowlands

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

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Abstract

Failure modes and effect analysis (FMEA) is widely used in industry to quantify, mitigate, and eliminate risk for products and processes. It has the potential to be an important technique in supporting sustainable manufacturing by reducing the risks associated with transitioning to more sustainable processes. Whilst traditional FMEA does quantify risk by calculating a risk priority number (RPN), there are limitations to the usefulness of this due to the lack of objectiveness inherent in the method. In this paper improvements to the traditional FMEA approach are reviewed and their appropriateness in the specific case of the manufacture of electrostatic chucks (ESC) is considered.

Original languageEnglish
Title of host publicationSustainable Design and Manufacturing - Proceedings of the 9th International Conference on Sustainable Design and Manufacturing SDM 2022
Subtitle of host publicationProceedings of the 9th International Conference on Sustainable Design and Manufacturing (SDM 2022)
EditorsSteffen G. Scholz, Robert J. Howlett, Rossi Setchi
PublisherSpringer
Pages159-167
Number of pages9
ISBN (Electronic)978-981-19-9205-6
ISBN (Print)978-981-19-9204-9
DOIs
Publication statusPublished - 1 Jan 2023

Publication series

NameSmart Innovation, Systems and Technologies
PublisherSpringer
Volume338
ISSN (Print)2190-3018
ISSN (Electronic)2190-3026

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