@inproceedings{6d6de5827f024658bbdfd6bc785ae7e2,
title = "A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation",
abstract = "Failure modes and effect analysis (FMEA) is widely used in industry to quantify, mitigate, and eliminate risk for products and processes. It has the potential to be an important technique in supporting sustainable manufacturing by reducing the risks associated with transitioning to more sustainable processes. Whilst traditional FMEA does quantify risk by calculating a risk priority number (RPN), there are limitations to the usefulness of this due to the lack of objectiveness inherent in the method. In this paper improvements to the traditional FMEA approach are reviewed and their appropriateness in the specific case of the manufacture of electrostatic chucks (ESC) is considered.",
author = "Steffan James and Hefin Rowlands",
year = "2023",
month = jan,
day = "1",
doi = "10.1007/978-981-19-9205-6_15",
language = "English",
isbn = "978-981-19-9204-9",
series = "Smart Innovation, Systems and Technologies ",
publisher = "Springer",
pages = "159--167",
editor = "Scholz, {Steffen G.} and Howlett, {Robert J. } and Rossi Setchi",
booktitle = "Sustainable Design and Manufacturing - Proceedings of the 9th International Conference on Sustainable Design and Manufacturing SDM 2022",
address = "Germany",
}
