A Novel Approach for Size Up-Scaling of Nickel Master for the Replication of Micro and Nano Features

Krastimir Popov, Hassan Hirshy, Petko Petkov

Research output: Contribution to conferenceOtherpeer-review

Abstract

This paper proposes a novel approach and a process chain for precision assembly of nano imprinted Ni shims on a larger Ni master plate and fixing them using laser welding. The capabilities of micro-manufacturing technologies (milling and assembly) were combined with those of nano-manufacturing to stitch produced Ni shims on a template in order to achieve a relatively large area for further imprinting using Roll-To-Roll (R2R) technology. The results of two setups are shown and analysed with the main sources of errors pointed out. Laser welding of the assembly tests were carried out in order to investigate the best of the welding path geometries commonly used in "macro" world.
Original languageEnglish
Pages73-76
DOIs
Publication statusPublished - 2012
Event9th International Conference on Multi-Material Micro Manufacture -
Duration: 9 Oct 201211 Oct 2012

Conference

Conference9th International Conference on Multi-Material Micro Manufacture
Period9/10/1211/10/12

Keywords

  • Ni-shims for assembly for nano-imprinting
  • Micro-assembly
  • Precision assembly

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