Master Tool Fabrication for the Replication of Micro and Nano Features

Hirshy H., Lalev G., Velkova V. L., Scholz S., Dimov S. S., Krastimir Popov

Allbwn ymchwil: Cyfraniad at gynhadleddAralladolygiad gan gymheiriaid

Crynodeb

A novel process chain for master tool fabrication for the replication of micro and nano features is presented in this paper. The proposed process flow relies on using complementary direct write and replication technologies for micro- and nano-structuring over relatively large areas. Results are presented when the process chain is implemented for the production of 5”x5” Ni shims of 2.5D topography of different test structures incorporating different feature sizes.
Iaith wreiddiolSaesneg
Tudalennau317-320
Dynodwyr Gwrthrych Digidol (DOIs)
StatwsCyhoeddwyd - 2011
Digwyddiad8th International Conference on Multi-Material Micro Manufacture -
Hyd: 8 Nov 201110 Nov 2011

Cynhadledd

Cynhadledd8th International Conference on Multi-Material Micro Manufacture
Cyfnod8/11/1110/11/11

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