A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation

Steffan James; Hefin Rowlands

doi:10.1007/978-981-19-9205-6_15

A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation

Steffan James, Hefin Rowlands

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Failure modes and effect analysis (FMEA) is widely used in industry to quantify, mitigate, and eliminate risk for products and processes. It has the potential to be an important technique in supporting sustainable manufacturing by reducing the risks associated with transitioning to more sustainable processes. Whilst traditional FMEA does quantify risk by calculating a risk priority number (RPN), there are limitations to the usefulness of this due to the lack of objectiveness inherent in the method. In this paper improvements to the traditional FMEA approach are reviewed and their appropriateness in the specific case of the manufacture of electrostatic chucks (ESC) is considered.

Iaith wreiddiol	Saesneg
Teitl	Sustainable Design and Manufacturing - Proceedings of the 9th International Conference on Sustainable Design and Manufacturing SDM 2022
Is-deitl	Proceedings of the 9th International Conference on Sustainable Design and Manufacturing (SDM 2022)
Golygyddion	Steffen G. Scholz, Robert J. Howlett, Rossi Setchi
Cyhoeddwr	Springer
Tudalennau	159-167
Nifer y tudalennau	9
ISBN (Electronig)	978-981-19-9205-6
ISBN (Argraffiad)	978-981-19-9204-9
Dynodwyr Gwrthrych Digidol (DOIs)	https://doi.org/10.1007/978-981-19-9205-6_15
Statws	Cyhoeddwyd - 1 Ion 2023

Cyfres gyhoeddiadau

Enw	Smart Innovation, Systems and Technologies
Cyhoeddwr	Springer
Cyfrol	338
ISSN (Argraffiad)	2190-3018
ISSN (Electronig)	2190-3026

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James, S., & Rowlands, H. (2023). A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation. Yn S. G. Scholz, R. J. Howlett, & R. Setchi (Gol.), Sustainable Design and Manufacturing - Proceedings of the 9th International Conference on Sustainable Design and Manufacturing SDM 2022: Proceedings of the 9th International Conference on Sustainable Design and Manufacturing (SDM 2022) (tt. 159-167). (Smart Innovation, Systems and Technologies ; Cyfrol 338). Springer. https://doi.org/10.1007/978-981-19-9205-6_15

James, Steffan ; Rowlands, Hefin. / A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation. Sustainable Design and Manufacturing - Proceedings of the 9th International Conference on Sustainable Design and Manufacturing SDM 2022: Proceedings of the 9th International Conference on Sustainable Design and Manufacturing (SDM 2022). Gol. / Steffen G. Scholz ; Robert J. Howlett ; Rossi Setchi. Springer, 2023. tt. 159-167 (Smart Innovation, Systems and Technologies ).

@inproceedings{6d6de5827f024658bbdfd6bc785ae7e2,

title = "A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation",

abstract = "Failure modes and effect analysis (FMEA) is widely used in industry to quantify, mitigate, and eliminate risk for products and processes. It has the potential to be an important technique in supporting sustainable manufacturing by reducing the risks associated with transitioning to more sustainable processes. Whilst traditional FMEA does quantify risk by calculating a risk priority number (RPN), there are limitations to the usefulness of this due to the lack of objectiveness inherent in the method. In this paper improvements to the traditional FMEA approach are reviewed and their appropriateness in the specific case of the manufacture of electrostatic chucks (ESC) is considered.",

author = "Steffan James and Hefin Rowlands",

year = "2023",

month = jan,

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doi = "10.1007/978-981-19-9205-6_15",

language = "English",

isbn = "978-981-19-9204-9",

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publisher = "Springer",

pages = "159--167",

editor = "Scholz, {Steffen G.} and Howlett, {Robert J. } and Rossi Setchi",

booktitle = "Sustainable Design and Manufacturing - Proceedings of the 9th International Conference on Sustainable Design and Manufacturing SDM 2022",

address = "Germany",

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James, S & Rowlands, H 2023, A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation. yn SG Scholz, RJ Howlett & R Setchi (gol.), Sustainable Design and Manufacturing - Proceedings of the 9th International Conference on Sustainable Design and Manufacturing SDM 2022: Proceedings of the 9th International Conference on Sustainable Design and Manufacturing (SDM 2022). Smart Innovation, Systems and Technologies , cyfrol. 338, Springer, tt. 159-167. https://doi.org/10.1007/978-981-19-9205-6_15

A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation. / James, Steffan; Rowlands, Hefin.

Sustainable Design and Manufacturing - Proceedings of the 9th International Conference on Sustainable Design and Manufacturing SDM 2022: Proceedings of the 9th International Conference on Sustainable Design and Manufacturing (SDM 2022). gol. / Steffen G. Scholz; Robert J. Howlett; Rossi Setchi. Springer, 2023. t. 159-167 (Smart Innovation, Systems and Technologies ; Cyfrol 338).

Allbwn ymchwil: Pennod mewn Llyfr/Adroddiad/Trafodion Cynhadledd › Cyfraniad i gynhadledd › adolygiad gan gymheiriaid

TY - GEN

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AU - Rowlands, Hefin

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Y1 - 2023/1/1

N2 - Failure modes and effect analysis (FMEA) is widely used in industry to quantify, mitigate, and eliminate risk for products and processes. It has the potential to be an important technique in supporting sustainable manufacturing by reducing the risks associated with transitioning to more sustainable processes. Whilst traditional FMEA does quantify risk by calculating a risk priority number (RPN), there are limitations to the usefulness of this due to the lack of objectiveness inherent in the method. In this paper improvements to the traditional FMEA approach are reviewed and their appropriateness in the specific case of the manufacture of electrostatic chucks (ESC) is considered.

AB - Failure modes and effect analysis (FMEA) is widely used in industry to quantify, mitigate, and eliminate risk for products and processes. It has the potential to be an important technique in supporting sustainable manufacturing by reducing the risks associated with transitioning to more sustainable processes. Whilst traditional FMEA does quantify risk by calculating a risk priority number (RPN), there are limitations to the usefulness of this due to the lack of objectiveness inherent in the method. In this paper improvements to the traditional FMEA approach are reviewed and their appropriateness in the specific case of the manufacture of electrostatic chucks (ESC) is considered.

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James S, Rowlands H. A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation. Yn Scholz SG, Howlett RJ, Setchi R, golygyddion, Sustainable Design and Manufacturing - Proceedings of the 9th International Conference on Sustainable Design and Manufacturing SDM 2022: Proceedings of the 9th International Conference on Sustainable Design and Manufacturing (SDM 2022). Springer. 2023. t. 159-167. (Smart Innovation, Systems and Technologies ). doi: 10.1007/978-981-19-9205-6_15

A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation

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