A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation

Steffan James, Hefin Rowlands

Allbwn ymchwil: Pennod mewn Llyfr/Adroddiad/Trafodion CynhadleddCyfraniad i gynhadleddadolygiad gan gymheiriaid

20 Wedi eu Llwytho i Lawr (Pure)

Crynodeb

Failure modes and effect analysis (FMEA) is widely used in industry to quantify, mitigate, and eliminate risk for products and processes. It has the potential to be an important technique in supporting sustainable manufacturing by reducing the risks associated with transitioning to more sustainable processes. Whilst traditional FMEA does quantify risk by calculating a risk priority number (RPN), there are limitations to the usefulness of this due to the lack of objectiveness inherent in the method. In this paper improvements to the traditional FMEA approach are reviewed and their appropriateness in the specific case of the manufacture of electrostatic chucks (ESC) is considered.

Iaith wreiddiolSaesneg
TeitlSustainable Design and Manufacturing - Proceedings of the 9th International Conference on Sustainable Design and Manufacturing SDM 2022
Is-deitlProceedings of the 9th International Conference on Sustainable Design and Manufacturing (SDM 2022)
GolygyddionSteffen G. Scholz, Robert J. Howlett, Rossi Setchi
CyhoeddwrSpringer
Tudalennau159-167
Nifer y tudalennau9
ISBN (Electronig)978-981-19-9205-6
ISBN (Argraffiad)978-981-19-9204-9
Dynodwyr Gwrthrych Digidol (DOIs)
StatwsCyhoeddwyd - 1 Ion 2023

Cyfres gyhoeddiadau

EnwSmart Innovation, Systems and Technologies
CyhoeddwrSpringer
Cyfrol338
ISSN (Argraffiad)2190-3018
ISSN (Electronig)2190-3026

Ôl bys

Gweld gwybodaeth am bynciau ymchwil 'A Review of Failure Mode and Effects Analysis (FMEA) for Sustainable Manufacturing and Improvement in Electrostatic Chuck Manufacture and Operation'. Gyda’i gilydd, maen nhw’n ffurfio ôl bys unigryw.

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